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2009 MEMS inertial sensors status and trends 2010
inertial sensors including accelerometers (or accelerometer sensor dollars) and the speed sensor angle (gyroscope) and AHRS single, combined three-axis IMU (Inertial Measurement Unit), (including the magnetic sensor reference system attitude).
Does the use of MEMS accelerometer inertial sensing the quality of the force measuring sensors, the overall quality of the block (sensor) and the circuit detection. According to the different sensing principle, mainly type piezoresistive, capacitive, piezoelectric, the current tunnel type, the type of resonance, type of thermal and electromagnetic coupling and so on.
In 1998, the United States CSDL design and development of the first MEMS gyroscope. In the same year, Drapor lab developed another form of MEMS gyroscope.
MEMS gyroscope is the use of ground vibration has been the base (Shell) driven rotation Coriolis effect at the beginning of the angular velocity sensor is made.
Mainly driven frame type (inside and outside the framework of the two types) comb-drive, driven by electromagnetic and so on.
IMU, as it is a combination of MEMS technology, a unit of measurement of micro-inertial, so many places called MIMU. Mainly by the three MEMS accelerometers and gyroscopes three circuit Solver.
AHRS consists of three magnetic sensors, compared to the Islamic Movement of Uzbekistan, and is based on four elements in France understand the calculation, you can print directly onto a sports field angle of the body, the roll angle and heading angle.
Low precision MEMS inertial sensors, such as consumer electronics products are mainly used in mobile phones, game consoles, players music, wireless mouse, digital cameras, PD, protector of hard disk, smart toys, pedometer, anti-theft system, GPS navigation, portable. Due to the acceleration measurement, the measurement of tilt, measurements of vibration measurement and uniform rotation and other basic measures, which were excavated Applications consumer electronics continue to emerge.
MEMS inertial sensors intermediate degree of quality products and automotive industry, are mainly used in automotive electronic stability systems (ESP or ESC) assisted GPS navigation systems, automobile airbag, the vehicle attitude measurement, agriculture precision, industrial automation, medical equipment, large-scale robotics, instruments | instruments and meters, construction machinery and so on.
High precision MEMS inertial sensors such as grade-level products and military and aerospace, the main demand of high precision, temperature range, beatings and other indexes. Mainly used in wireless communications satellite, missile seeker, optical systems for targeting, the stability of applications, aircraft and missile flight control, attitude control, guidance damping control applications, as well as medium-missile guidance scope, applications, inertial guided GPS navigation, remote control equipment boat aircraft, battlefield robots.
For consumer electronics MEMS sensors inertial, the main requirement is that the low price, small size, narrow range of temperature, so that the accuracy is low, or even functional products. The acceleration sensors, light weight, power consumption is small, usually 1 ~ 10g ~ 50g, Resolution 2 mg ~ 10 mg, generally range in the main the range of ± 300 ° / S, zero bias at 500 ° / h ~ 1000 ° / h, so that products of the companies did not give a zero bias or indicators to give 0.1 ° / s ~ 0.5 ° / s.
MEMS accelerometer can be produced today are more companies, most semiconductors, such as the United States ADI, Invensense, ST, Freescale, Sensor Dynamics, MSI (ICSensor) MEMSIC (producer in Wuxi, China), Europe, VTI, Infine, production of MEMS gyroscope United States, ADI, Knoix, ST, Europe, Infine, meth, Japan, Murata, National, Oki, Fujitsu. December 3 Di Semiconductor Co., Ltd. of Shenzhen, Shanghai, China issued a consumer-grade MEMS gyroscopes, a company in Wuxi is also in development. About the Author
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